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1 July 1990 Recent charge-coupled device optimization results at Steward Observatory
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Abstract
Recent research efforts aimed at optimizing charge-coupled devices (CCDs) after their manufacture to achieve maximum quantum efficiency, wide spectral bandpass, and excellent cosmetics and surface flatness are discussed. Results are presented of a new acid thinning agitation technique which produces very uniform, high-quality surfaces on large area square and rectangular CCDs and 4-in silicon wafers for back illuminated operation. A method of cleaning thinned CCDs before antireflection coating for increased quantum efficiency is also discussed. The results of initial experiments with a new packaging method to mount thinned CCDs while maintaining a very flat imaging surface are presented. This bump bonding mounting technique increases yield due to reduced handling and robust packaging and is expandable to tightly packed large area focal plane mosaics.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael P. Lesser "Recent charge-coupled device optimization results at Steward Observatory", Proc. SPIE 1235, Instrumentation in Astronomy VII, (1 July 1990); https://doi.org/10.1117/12.19088
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