Ultrafast ablation dynamics of Cu by single pulse and GHz fs laser bursts

Minok Park; Yueran Gu; Xianglei Mao; Costas P. Grigoropoulos; Vassilia Zorba

doi:10.1117/12.2664731

17 March 2023 Ultrafast ablation dynamics of Cu by single pulse and GHz fs laser bursts

Minok Park, Yueran Gu, Xianglei Mao, Costas P. Grigoropoulos, Vassilia Zorba

Proceedings Volume 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; 124080I (2023) https://doi.org/10.1117/12.2664731
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

In this work, we study the ablation dynamics of copper (Cu) induced by single fs pulse and fs GHz bursts using in situ multimodal diagnostics; time-resolved scattering imaging, emission imaging, and optical emission spectroscopy. Multimodal probing techniques reveal that fs GHz bursts rapidly remove molten liquid Cu from the irradiated spot due to the recoil pressure exerted by following fs pulses. Material ejection stops after burst irradiation due to the limited amount of remnant matter, combined with the suppressed heat conduction into the target material. Our work provides insights into the complex ablation mechanisms of GHz fs bursts, which are critical in selecting optimal laser conditions in cross-cutting processing and micro/nano-fabrication applications.

Conference Presentation

Citation Download Citation

Minok Park, Yueran Gu, Xianglei Mao, Costas P. Grigoropoulos, and Vassilia Zorba "Ultrafast ablation dynamics of Cu by single pulse and GHz fs laser bursts", Proc. SPIE 12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, 124080I (17 March 2023); https://doi.org/10.1117/12.2664731

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