Low-loss photonic integrated circuits for UV applications

W. A. P. M. Hendriks; M. Dijkstra; S. Mardani; I. Hegeman; Sonia M. Garcia-Blanco

doi:10.1117/12.2657143

17 March 2023 Low-loss photonic integrated circuits for UV applications

W. A. P. M. Hendriks, M. Dijkstra, S. Mardani, I. Hegeman, Sonia M. Garcia-Blanco

Author Affiliations +

Proceedings Volume 12424, Integrated Optics: Devices, Materials, and Technologies XXVII; 1242402 (2023) https://doi.org/10.1117/12.2657143
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We present a low propagation loss aluminium oxide integrated photonics platform enabling applications with operation down to the UV wavelength range (i.e., <250 nm). Single mode fully etched waveguides were fabricated with losses below 2 dB/cm at 405 nm. The influence of waveguide dimensions on the propagation losses are presented, indicating that losses are sidewall roughness limited. Lower losses can be achieved by further optimization of the cross-section of the waveguides. In this presentation, the aluminium oxide platform will be introduced together with the characterization of the waveguides at near-UV wavelengths.

Conference Presentation

Citation Download Citation

W. A. P. M. Hendriks, M. Dijkstra, S. Mardani, I. Hegeman, and Sonia M. Garcia-Blanco "Low-loss photonic integrated circuits for UV applications", Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 1242402 (17 March 2023); https://doi.org/10.1117/12.2657143

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