Direct laser writing of micrograting arrays using a spatial light modulator

Jonas Strobelt; Matthew Van Soelen; David J. McGee

doi:10.1117/12.2647393

15 March 2023 Direct laser writing of micrograting arrays using a spatial light modulator

Jonas Strobelt, Matthew Van Soelen, David J. McGee

Proceedings Volume 12433, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI; 1243304 (2023) https://doi.org/10.1117/12.2647393
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Surface micrograting arrays have applications ranging from diffractive optics to bioengineered surfaces. We report a versatile fabrication platform for the maskless photofabrication of these arrays based on structured polarized light and photoresponsive azopolymer films. The films are patterned using a spatial light modulator (SLM) configured as a polarization modulator. The light source is a 488 nm laser with exposure times of order 5 sec or less. Structured polarized light from the SLM is imaged onto the film, writing a 120 µm x 80 µm surface relief pattern with amplitudes and periods controllable from 25 nm to 1 µm and 700 nm- 10 µm respectively. These are stitched into larger area patterns via XY translation. The versatility is demonstrated through a variety of micrograting patterns, including diffractive optical elements, multiplexed surface grating arrays, and diffractive optically variable image devices for optical security applications. In a different application, the biocompatibility of the polymeric film can be leveraged since cellular interaction with synthetic microscale structures influences a wide array of cell responses. We demonstrate this by showing directed cell growth mediated by the micrograting array. In all examples, the surface gratings required no post-exposure processing, are stable in ambient conditions, and can be replicated using nanoimprint lithography.

Conference Presentation

Citation Download Citation

Jonas Strobelt, Matthew Van Soelen, and David J. McGee "Direct laser writing of micrograting arrays using a spatial light modulator", Proc. SPIE 12433, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI, 1243304 (15 March 2023); https://doi.org/10.1117/12.2647393

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