Hybrid a-Se/RD53B CMOS detector: initial studies

Akyl Swaby; Jennifer Ott; Kaitlin Hellier; Maurice Garcia-Sciveres; Shiva Abbaszadeh

doi:10.1117/12.2654519

7 April 2023 Hybrid a-Se/RD53B CMOS detector: initial studies

Akyl Swaby, Jennifer Ott, Kaitlin Hellier, Maurice Garcia-Sciveres, Shiva Abbaszadeh

Proceedings Volume 12463, Medical Imaging 2023: Physics of Medical Imaging; 1246341 (2023) https://doi.org/10.1117/12.2654519
Event: SPIE Medical Imaging, 2023, San Diego, California, United States

Conference Poster

Abstract

We demonstrate measured radiation detection results from a 50 × 50 μm² pixel size direct-conversion amorphous selenium (a-Se)/CMOS hybrid detector. We are interested in investigating a monolithic hybrid CMOS detector composed of an a-Se photoconductor thin film integrated on a CMOS active pixel readout array. In this work, we attempt to verify the fabrication process of a-Se as a photoconductive layer for integration with an existing CMOS ASIC. For this initial investigation, the RD53B-ATLAS was used to validate the deposition of a-Se for integration with CMOS technology.

Citation Download Citation

Akyl Swaby, Jennifer Ott, Kaitlin Hellier, Maurice Garcia-Sciveres, and Shiva Abbaszadeh "Hybrid a-Se/RD53B CMOS detector: initial studies", Proc. SPIE 12463, Medical Imaging 2023: Physics of Medical Imaging, 1246341 (7 April 2023); https://doi.org/10.1117/12.2654519

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