On the performance of PVDF based piezoelectric sensor with microstructures

Rishikesh Srinivasaraghavan Govindarajan; Taylor Stark; Foram Madiyar; Daewon Kim

doi:10.1117/12.2658072

18 April 2023 On the performance of PVDF based piezoelectric sensor with microstructures

Rishikesh Srinivasaraghavan Govindarajan, Taylor Stark, Foram Madiyar, Daewon Kim

Proceedings Volume 12486, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2023; 124861B (2023) https://doi.org/10.1117/12.2658072
Event: SPIE Smart Structures + Nondestructive Evaluation, 2023, Long Beach, California, United States

Abstract

This paper aims to investigate the performance of piezoelectric sensors with different shapes of 3D-printed microstructures. Based on the numerical analysis in the time-frequency domain, the microstructures are printed directly on the PVDF transparent film exhibiting higher piezoelectric coefficients using a high-resolution two-photon polymerization method. Bi-directional gold IDTs are fabricated by sputtering gold onto the substrate surface using a 3D-printed stencil. The mechanical properties of the film and surface morphology of printed microstructures are examined using a nanoindenter and a 3D profilometer. The change in frequency response due to the microstructure is measured using a network analyzer. This study will be a reference for developing an efficient wave-based gas sensor with enhanced sensitivity.

Conference Presentation

Citation Download Citation

Rishikesh Srinivasaraghavan Govindarajan, Taylor Stark, Foram Madiyar, and Daewon Kim "On the performance of PVDF based piezoelectric sensor with microstructures", Proc. SPIE 12486, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2023, 124861B (18 April 2023); https://doi.org/10.1117/12.2658072

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