Structured assist features in inverse lithography

Yuri Granik; Philip Wang

doi:10.1117/12.2658771

28 April 2023 Structured assist features in inverse lithography

Yuri Granik, Philip Wang

Proceedings Volume 12495, DTCO and Computational Patterning II; 1249504 (2023) https://doi.org/10.1117/12.2658771
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

The original inverse lithography technology (ILT) commitment of creating a free-form mask from ex nihilo underwent transformation under pressure of constraints that are imposed by the capabilities of manufacturing and inspection equipment. This pressure became especially noticeable in the dealing with sub-resolution assist features (SRAF). The freeform SRAFs are naturally unmanufacturable and hard to inspect. In addition to this complication, the ILT signal for SRAFs is substantially weaker and often ill-defined in comparison to a strong signal from fidelity objectives to print main features on target. So, it is difficult to automatically produce SRAFs that are simultaneously geometrically stable, do not print, MRC-clean, and deliver the best lithographic quality. To overcome these obstacles, we propose new concept of structured SRAFs by combining ILT ideas with robust geometrical parameterization to introduce well-behaved and MRC-clean by construction mask decorations.

Conference Presentation

Citation Download Citation

Yuri Granik and Philip Wang "Structured assist features in inverse lithography", Proc. SPIE 12495, DTCO and Computational Patterning II, 1249504 (28 April 2023); https://doi.org/10.1117/12.2658771

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