A total shift show: submilliradian tilt goniometry in scanning electron microscopy

Andrew C. Madison; John S. Villarrubia; Daron A. Westly; Ronald G. Dixson; Craig R. Copeland; John D. Gerling; Katherine A. Cochrane; Alan D. Brodie; Lawrence P. Muray; J. Alexander Liddle; Samuel M. Stavis

doi:10.1117/12.2673963

30 April 2023 A total shift show: submilliradian tilt goniometry in scanning electron microscopy

Andrew C. Madison, John S. Villarrubia, Daron A. Westly, Ronald G. Dixson, Craig R. Copeland, John D. Gerling, Katherine A. Cochrane, Alan D. Brodie, Lawrence P. Muray, J. Alexander Liddle, Samuel M. Stavis

Author Affiliations +

Proceedings Volume 12496, Metrology, Inspection, and Process Control XXXVII; 1249606 (2023) https://doi.org/10.1117/12.2673963
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Shift happens due to electron beam tilt in scanning electron microscopy. To measure this aberration effect with submilliradian uncertainty, and to calibrate scale factor and correct scanfield distortion, we introduce conical frustum arrays as multifunctional reference structures. Our concept shows promise for new accuracy in scanning electron microscopy.

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Andrew C. Madison, John S. Villarrubia, Daron A. Westly, Ronald G. Dixson, Craig R. Copeland, John D. Gerling, Katherine A. Cochrane, Alan D. Brodie, Lawrence P. Muray, J. Alexander Liddle, and Samuel M. Stavis "A total shift show: submilliradian tilt goniometry in scanning electron microscopy", Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 1249606 (30 April 2023); https://doi.org/10.1117/12.2673963

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