Positive tone i-line photoresist with controlled undercut profile for advanced packaging

Walter Weihong Liu; Chunwei Chen; Ping-Hung Lu; SookMee Lai; Yoshiharu Sakurai

doi:10.1117/12.2657694

30 April 2023 Positive tone i-line photoresist with controlled undercut profile for advanced packaging

Walter Weihong Liu, Chunwei Chen, Ping-Hung Lu, SookMee Lai, Yoshiharu Sakurai

Proceedings Volume 12498, Advances in Patterning Materials and Processes XL; 124981K (2023) https://doi.org/10.1117/12.2657694
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

With the progress of advanced packaging, the RDL metal line and μBump stability and super electrical performance were highly concerned. The photoresist with undercut profile is required to obtain the RDL metal line and μBump with footing. The AZ® 3DT-400 series formulation is a chemically amplified positive-tone i-line photoresist developed by EMD Electronics which a special additive was introduced to generate the undercut profile. The undercut size and shape can be adjusted with the loading of the additive. After optimizing the formulation, the desired undercut length larger than 10% of the target CD and the undercut height less than 10% of target CD were achieved.

Citation Download Citation

Walter Weihong Liu, Chunwei Chen, Ping-Hung Lu, SookMee Lai, and Yoshiharu Sakurai "Positive tone i-line photoresist with controlled undercut profile for advanced packaging", Proc. SPIE 12498, Advances in Patterning Materials and Processes XL, 124981K (30 April 2023); https://doi.org/10.1117/12.2657694

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available