Paper
9 January 2023 Study on surface and subsurface qualities in rotary ultrasonic vibration-assisted peripheral grinding of ULE
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Abstract
UlE, as a kind of ultra-low thermal expansion glass, has been widely applied in large-aperture optical mirrors and space telescopes. However, hard-brittle material feature of ULE brings certain difficulty for machining. In this paper, rotary ultrasonic vibration-assisted peripheral grinding (RUPG), combining rotary ultrasonic vibratio (UV) and conventional grinding (CG) is proposed, and grinding process and quality characteristic are investigated in terms of surface morphology, grinding force, surface roughness, subsurface damage depth, and subsurface morphology. A serious of comparative experiments for between RUPG and CG were conducted. The results show that rotary UV in RUPG can markedly decrease the grinding force with a factor of 46.78%. The change rule of grinding force with the varying of grinding parameters in RUPG is consistent with that in CG, i.e., grinding force increases as the increasing of grinding depth and feed rate, while it decreases with the growth of spindle speed. Grinding surface marks were found to be obviously weakened by UV and surface consistency was accordingly improved. Besides, measurement results of surface roughness also real that UV plays a positive role in diminishing surface roughness by almost 23.01%, and reducing the subsurface damage depth by a factor of 17.19%.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guoyan Sun, Feng Shi, Yongsheng Yao, Jiaoteng Ding, and Yongjie Wang "Study on surface and subsurface qualities in rotary ultrasonic vibration-assisted peripheral grinding of ULE", Proc. SPIE 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 1250715 (9 January 2023); https://doi.org/10.1117/12.2655438
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KEYWORDS
Surface roughness

Lens grinding

Precision processing technology

Ultra low expansion glass

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