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15 June 2023 Resonant cavity enhanced infrared photodiodes
Andrew Marshall, Andrew Bainbridge, Laura Hanks, Adam P. Craig
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Proceedings Volume 12534, Infrared Technology and Applications XLIX; 125341H (2023) https://doi.org/10.1117/12.2664355
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States
Abstract
We report on a multi-year development effort demonstrating resonant cavity enhanced photodiodes (RCE-PDs) with an all-epitaxial architecture, exploiting the GaSb matched material system and its increasingly popular family of IR absorbers. RCE-PDs redefine the relationship between signal and noise generation within IR detectors, breaking some of the performance limits constraining conventional IR detectors. High performance RCE-PDs are achieved with resonance wavelengths from the SWIR to the LWIR, using GaSb/AlAsSb DBR mirrors and InGaAsSb, InAs, InAsSb and T2SL absorbers. Finally, we introduce a graded thickness RCE-PD which can perform the function of a spectrometer on a chip.
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Andrew Marshall, Andrew Bainbridge, Laura Hanks, and Adam P. Craig "Resonant cavity enhanced infrared photodiodes", Proc. SPIE 12534, Infrared Technology and Applications XLIX, 125341H (15 June 2023); https://doi.org/10.1117/12.2664355
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KEYWORDS
Sensors
Photodiodes
Infrared photography
Infrared radiation
Mirrors
Quantum efficiency
Semiconductors
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