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1 June 1990 Low-voltage scanning electron metrology
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Abstract
This paper deals with the problems of using a low voltage scanning electron beam in a measurement instrument. Consideration shall be given to surface charging and thin film materials, condenser and objective lenses, filaments, scanning coil design, scan generation systems, detectors, and outputs.The measurement of geometries, methods of determining geometry edges, resolution, magnification, focus, depth of focus, image rotation, and staging necessary to locate the geometry to be measured will also be discussed. Data are presented from fundamental research.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Harry L. Coleman "Low-voltage scanning electron metrology", Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); doi: 10.1117/12.20067; https://doi.org/10.1117/12.20067
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