An exploration of laser scanning modalities: from raster and spiral to Lissajous and Risley prisms-based

Attila Csillag; Virgil-Florin Duma

doi:10.1117/12.2665237

10 August 2023 An exploration of laser scanning modalities: from raster and spiral to Lissajous and Risley prisms-based

Attila Csillag, Virgil-Florin Duma

Proceedings Volume 12619, Modeling Aspects in Optical Metrology IX; 126190S (2023) https://doi.org/10.1117/12.2665237
Event: SPIE Optical Metrology, 2023, Munich, Germany

Conference Poster

Abstract

Laser scanning is employed in a variety of modalities, including the most common raster scanning, as well as spiral, Lissajous, or Risley prism-based (the later a type of rhodonea) scanning. The first two can have the advantage of linearity, while the last two are faster, although they are highly non-linear. The present study performs an exploration of such aspects. Thus, we compare the characteristics of the above-mentioned modalities, with an emphasis on parameters such as field of view (FOV), linearity, resolution, and fill factor (FF). Simulations are carried out regarding different types of scanning patterns, as well as some experimental validations. Also, results from some of our recent studies on galvanometer-, polygon mirror-, and Risley prisms-based scanning are utilized. Some of the specific performances of the considered scanning modalities are discussed, highlighting advantages and drawbacks.

Citation Download Citation

Attila Csillag and Virgil-Florin Duma "An exploration of laser scanning modalities: from raster and spiral to Lissajous and Risley prisms-based", Proc. SPIE 12619, Modeling Aspects in Optical Metrology IX, 126190S (10 August 2023); https://doi.org/10.1117/12.2665237

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