This paper studies the etiemistry of image reversal (1R) systems based on 2,1,4-
diazoquinone substituted trihydroxybenzophenone (THBP) , tetrahydroxybenzophenone
(tetra-HBP), p-cumylphenol (PCP) and novolac resins (N). Results are investigated
in depth as to their impact on the functional behavior of the IR resist. Both
cross-linking and decarboxylation modes are studied , as they relate to energy
to clear. It is shown that using cross-linking systems based on the above DAQ
esters, a m/p novolac, and a bifunctional cross-linking agent of the type '2
wherein X = OH, the broadband energy required to effect cross-linking decreases
in the order of PCP > N > tetra-HBP > THBP. The concentration of the afore-
mentioned sensitizers was in all cases equimolar in terms of diazo content.
Surprisingly, in decarboxylation IR, the exposure energy required to effect
decarboxylation decreases in the order of tetra-HBP > THBP > N > PCP,
essentially a complete reversal as compared with cross-linking type IR.