Fabrication of superconducting quantum circuits on 12-inch wafers using an ArF immersion lithography system

Satoru Odate; Naooki Saito; Kosuke Suzuki; Hajime Aoyama; Koichi Kusuyama; Yasunobu Nakamura; Hiroyuki Tsukamoto

doi:10.1117/12.2675964

5 October 2023 Fabrication of superconducting quantum circuits on 12-inch wafers using an ArF immersion lithography system

Satoru Odate, Naooki Saito, Kosuke Suzuki, Hajime Aoyama, Koichi Kusuyama, Yasunobu Nakamura, Hiroyuki Tsukamoto

Author Affiliations +

Proceedings Volume 12652, UV and Higher Energy Photonics: From Materials to Applications 2023; 1265205 (2023) https://doi.org/10.1117/12.2675964
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

In recent years, the number of qubits in superconducting quantum computers has increased. It is anticipated that future attempts to realize fault-tolerant superconducting quantum computers will require an ability to fabricate large numbers of superconducting qubits uniformly on large-area substrates. Specifically, it is expected that technology will be developed to fabricate a large number of Josephson junctions on a 12-inch substrate in a short period with minimum dimensional variations in the superconducting quantum circuits. In this manuscript, we report on a technology that enables the uniform formation of resist patterns for Josephson junctions in large quantities on 12-inch substrates by replacing electron beam lithography with ArF immersion lithography.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Satoru Odate, Naooki Saito, Kosuke Suzuki, Hajime Aoyama, Koichi Kusuyama, Yasunobu Nakamura, and Hiroyuki Tsukamoto "Fabrication of superconducting quantum circuits on 12-inch wafers using an ArF immersion lithography system", Proc. SPIE 12652, UV and Higher Energy Photonics: From Materials to Applications 2023, 1265205 (5 October 2023); https://doi.org/10.1117/12.2675964

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available