1 August 1990 Surface metrology by phase contrast
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Proceedings Volume 1266, In-Process Optical Measurements and Industrial Methods; (1990) https://doi.org/10.1117/12.20271
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
Abstract
Increasing use of electrooptical imaging and detection systems in thermography high density information storage laser instrumentation and X-ray optics has led to a pressing need for machinecompatible sensors for the measurement of surface texture. This paper reviews recent advances in the use of deterministic and parametric noncontact methods for texture measurement and justifies the need for objective simple and yet precise means for displaying the microfinish of a machined surface. The design of a simple two channel phase contrast microscope is described which can be calibrated by test pieces and used as a means for optimising the process parameters involved in the generation of high quality surfaces. Typical results obtained with this technique including dynamic range and ultimate sensitivity are discussed. 1 . NEED FOR SURFACE METROLOGY Surface quality has a direct influence on product acceptability in many different industries including those concerned with optoelectronics and engineering. The influence may be cosmetic as with paint finish on a motor car body or functional for example when excessive wear rates may occur in a bearing surface with inadequate oil retention. Since perfection can never be achieved and overspecification can be costly it is clearly necessary to be able to define thresholds of acceptance in relation to different situations. Such thresholds do of course require agreed methods of measurement with traceability to national standards. The current trends in surface metrology are towards higher
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lionel R. Baker, Lionel R. Baker, } "Surface metrology by phase contrast", Proc. SPIE 1266, In-Process Optical Measurements and Industrial Methods, (1 August 1990); doi: 10.1117/12.20271; https://doi.org/10.1117/12.20271
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