NUV and DUV high-magnification unified lens objectives: optical design

Dmitry N. Frolov; Olga A. Vinogradova; Alexey D. Frolov; Alexandr D. Pavlii

doi:10.1117/12.2678322

28 September 2023 NUV and DUV high-magnification unified lens objectives: optical design

Dmitry N. Frolov, Olga A. Vinogradova, Alexey D. Frolov, Alexandr D. Pavlii

Proceedings Volume 12665, Novel Optical Systems, Methods, and Applications XXVI; 126650V (2023) https://doi.org/10.1117/12.2678322
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Conference Poster

Abstract

The operation of the optical system in the short-wave part of the optical spectrum makes it possible to increase the value of the resolution. This is relevant for microscopy using lens objectives. It is proposed to design the monochromatic microscope optics for use in NUV and DUV spectral ranges. Also an increase in the resolution is possible when using immersion, for example, water. Upon reaching increased values of resolution, it is necessary to increase the scale of the image obtained on the microscope. The unification of structural parameters for the same type of lens objectives operating in a given spectral range becomes an original engineering solution.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Dmitry N. Frolov, Olga A. Vinogradova, Alexey D. Frolov, and Alexandr D. Pavlii "NUV and DUV high-magnification unified lens objectives: optical design", Proc. SPIE 12665, Novel Optical Systems, Methods, and Applications XXVI, 126650V (28 September 2023); https://doi.org/10.1117/12.2678322

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