1 August 1990 Displacement sensor with electronically scanned white-light interferometer
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Proceedings Volume 1267, Fiber Optic Sensors IV; (1990) https://doi.org/10.1117/12.20297
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
Abstract
Absolute displacement sensing by white-light interferometry is demonstrated without mechanically moving parts in the receiving interferoineter. Its characteristics are: Michelson interferomneter with tilted mirrors, photodiode array of 1024 elements, lead-insensitivity up to 9 dB loss, displacement range 75 /.m, resolution 0.02 pm, read- out time < 7 ins, and multiplexing of several transducers.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Andreas Koch, Andreas Koch, Reinhard Ulrich, Reinhard Ulrich, } "Displacement sensor with electronically scanned white-light interferometer", Proc. SPIE 1267, Fiber Optic Sensors IV, (1 August 1990); doi: 10.1117/12.20297; https://doi.org/10.1117/12.20297
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