Displacement sensor with electronically scanned white-light interferometer

Andreas Koch; Reinhard Ulrich

doi:10.1117/12.20297

1 August 1990 Displacement sensor with electronically scanned white-light interferometer

Andreas Koch, Reinhard Ulrich

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Proceedings Volume 1267, Fiber Optic Sensors IV; (1990) https://doi.org/10.1117/12.20297
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

Absolute displacement sensing by white-light interferometry is demonstrated without mechanically moving parts in the receiving interferoineter. Its characteristics are: Michelson interferomneter with tilted mirrors, photodiode array of 1024 elements, lead-insensitivity up to 9 dB loss, displacement range 75 /.m, resolution 0.02 pm, read- out time < 7 ins, and multiplexing of several transducers.

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Andreas Koch and Reinhard Ulrich "Displacement sensor with electronically scanned white-light interferometer", Proc. SPIE 1267, Fiber Optic Sensors IV, (1 August 1990); doi: 10.1117/12.20297; https://doi.org/10.1117/12.20297

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