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1 August 1990Displacement sensor with electronically scanned white-light interferometer
Absolute displacement sensing by white-light interferometry is
demonstrated without mechanically moving parts in the receiving
interferoineter. Its characteristics are: Michelson interferomneter with
tilted mirrors, photodiode array of 1024 elements, lead-insensitivity
up to 9 dB loss, displacement range 75 /.m, resolution 0.02 pm, read-
out time < 7 ins, and multiplexing of several transducers.
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Andreas Koch, Reinhard Ulrich, "Displacement sensor with electronically scanned white-light interferometer," Proc. SPIE 1267, Fiber Optic Sensors IV, (1 August 1990); https://doi.org/10.1117/12.20297