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1 August 1990 Fiber optically addressed silicon-microresonator pressure sensor
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Proceedings Volume 1267, Fiber Optic Sensors IV; (1990)
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
Silicon micromechanical resonators have attracted a great deal of research interest because of their high sensitivity and the feature that the measurement of the parameter of interest is in the form of a frequency. The characteristics of optically excited and interrogated micromechanical resonators have been reported by a number of research groups but little information is available on the behaviour of these devices as sensors. In this paper, an all fibre optical system for the measurement of pressure is reported. Metal coated silicon microresonators have been excited by intensity modulated laser light delivered through an optical fibre. The vibration of the resonator is detected by an optical fibre interferometer. Optimum detection can be achieved by adjusting the distance between the end of the optical fibre and the surface of the silicon bridge. When used as a pressure sensor, the resonant frequency of the device was observed to change from 62kHz to 130kHz as the pressure varied from -0.6 bar to 1 bar (gauge).
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhineng Li, Deepak G. Uttamchandani, Li-Ming Zhang, and Brian Culshaw "Fiber optically addressed silicon-microresonator pressure sensor", Proc. SPIE 1267, Fiber Optic Sensors IV, (1 August 1990);


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