Practical considerations in using a binary pseudorandom array for instrument transfer function calibration

P. Z. Takacs; S. Rochester; I. Lacey; K. Munechika; U. Griesmann; V. V. Yashchuk

doi:10.1117/12.2677154

4 October 2023 Practical considerations in using a binary pseudorandom array for instrument transfer function calibration

P. Z. Takacs, S. Rochester, I. Lacey, K. Munechika, U. Griesmann, V. V. Yashchuk

Author Affiliations +

Proceedings Volume 12672, Applied Optical Metrology V; 126720K (2023) https://doi.org/10.1117/12.2677154
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

Binary pseudo-random array (BPRA) artifacts are useful devices for calibrating the instrument transfer function (ITF) of interferometric microscopes and other optical and non-optical surface and wavefront measurement instruments. The intrinsic white noise character of the power spectral density function of the artifact simplifies the deconvolution of the ITF from the measured power spectral density (PSD). However, resampling of the BPRA intrinsic artifact features with the measurement tool’s specific sampling pattern modifies the white noise character of the intrinsic spectrum and needs to be accounted for in the ITF-based data deconvolution process. We have developed an analytic solution to the spectrum of a resampled one- and two- dimensional BPRA. The resultant nominal PSD function is a simple two-parameter cosine function with a period equal to the resampled pixel width. A transfer function model for interferometric microscopes that incorporates this function, along with an ITF that includes aliasing effects and variable numerical aperture (NA), wavelength, and obscuration factor, is used to fit to the BPRA PSDs measured by an interference microscope for a range of objective and zoom lens magnification combinations.

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P. Z. Takacs, S. Rochester, I. Lacey, K. Munechika, U. Griesmann, and V. V. Yashchuk "Practical considerations in using a binary pseudorandom array for instrument transfer function calibration", Proc. SPIE 12672, Applied Optical Metrology V, 126720K (4 October 2023); https://doi.org/10.1117/12.2677154

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