Binary pseudo-random array (BPRA) for inspection and calibration for cylindrical wavefront interferometry

K. Munechika; S. Rochester; W. Chao; I. Lacey; C. Pina-Hernandez; Kaito Yamada; M. P. Biskach; A. Numata; V. V. Yashchuk

doi:10.1117/12.2677966

4 October 2023 Binary pseudo-random array (BPRA) for inspection and calibration for cylindrical wavefront interferometry

K. Munechika, S. Rochester, W. Chao, I. Lacey, C. Pina-Hernandez, Kaito Yamada, M. P. Biskach, A. Numata, V. V. Yashchuk

Author Affiliations +

Proceedings Volume 12677, Astronomical Optics: Design, Manufacture, and Test of Space and Ground Systems IV; 1267708 (2023) https://doi.org/10.1117/12.2677966
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

High-accuracy metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate X-ray light with nanometer-scale wavelengths. However, surface topography measurements are instrument dependent, and without the knowledge of how the instrument performs under the practical usage conditions, the measured data contain some degree of uncertainty. Binary Pseudo Random Array (BPRA) “white noise” artifact are effective and useful for characterizing the Instrument Transfer Function (ITF) of surface topography metrology tools and wavefront measurement instrument. BPRA artifact contains features with all spatial frequencies in the instrument bandpass with equal weight. As a result, power spectral density of the patterns has a deterministic white-noise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range. The application examples include electron microscopes, x-ray microscopes, interferometric microscopes, and large field-of-view Fizeau Interferometers. Furthermore, we will introduce the application of BPRA method to characterizing the ITF of Cylindrical Wavefront Interferometry (CWI), by developing the BPRA artifact which matches the radius of curvature of the cylindrical wavefront. The data acquisition and analysis procedures for different applications of the ITF calibration technique developed are also discussed.

Conference Presentation

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

K. Munechika, S. Rochester, W. Chao, I. Lacey, C. Pina-Hernandez, Kaito Yamada, M. P. Biskach, A. Numata, and V. V. Yashchuk "Binary pseudo-random array (BPRA) for inspection and calibration for cylindrical wavefront interferometry", Proc. SPIE 12677, Astronomical Optics: Design, Manufacture, and Test of Space and Ground Systems IV, 1267708 (4 October 2023); https://doi.org/10.1117/12.2677966

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