1 August 1990 Control of parameters of diffraction gratings on mirrors with multilayer coatings
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Proceedings Volume 1270, Optical Thin Films and Applications; (1990) https://doi.org/10.1117/12.20383
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
This paper contains the results of the theoretical and experimental investigations of the light diffraction on the gratings on the layered coatings. The theoretical expressions for the diffraction intensities for some practically important cases are obtained.Discussion is focused ()fl the problem of using theoretical results for control and measuring parameters of the diffraction gratings and thin films.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. F. Malkhozov, M. F. Malkhozov, A. S. Popov, A. S. Popov, V. M. Mjakinkov, V. M. Mjakinkov, } "Control of parameters of diffraction gratings on mirrors with multilayer coatings", Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20383; https://doi.org/10.1117/12.20383


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