A highly sophisticated antireflection coating and a cut-on-filter -
designed by the Leitz program "RDP" - will be pointed out. The program
runs on a VAX 8530 and allows to calculate reflectance, transmittance
and phase of randomly polarized light which interacts with marginal
surfaces. The number of layers is not limited. Some or even all layers
are allowed to be anistropic. Up to four layers may be inhomogeneous
both in refractive indices and absorption constants. At a time two
thicknesses, two refractive indices and absorption constants as well
as the angles of incidence may be varied independently in each run.
The calculated values will be compared with the results of measurements.
The antireflection coating is evaporated in a Balzers high
vacuum evaporation plant, controlled by the process unit BPU 420,
whereas the cut-on filter is evaporated in a Leybold box coater with
Leycom III and two electron-beam guns.