1 August 1990 Measuring surface roughness of an optical thin film with scanning tunneling microscopes
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Proceedings Volume 1270, Optical Thin Films and Applications; (1990); doi: 10.1117/12.20373
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
Abstract
Surface roughness of a fine metallic film. i.e.. mirror finished. has been determined by a Scanning Tunneling Microscope (STM). The mean value o the roughness is measured based on STM images of a three dimensional line plot of the surface profile. The technique is found capable of determining the roughness in a nanoscopic scale, lO m. Such technique is used in the present work to measure the roughness of various thin films ( 1 5 tm) in amorphous and crystalline structures.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Khaled J. Habib, Virgil B. Eling, C. Wu, "Measuring surface roughness of an optical thin film with scanning tunneling microscopes", Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20373; https://doi.org/10.1117/12.20373
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KEYWORDS
Scanning tunneling microscopy

Thin films

Surface roughness

3D image processing

Crystals

Mirrors

Glasses

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