1 August 1990 Measuring surface roughness of an optical thin film with scanning tunneling microscopes
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Proceedings Volume 1270, Optical Thin Films and Applications; (1990) https://doi.org/10.1117/12.20373
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
Abstract
Surface roughness of a fine metallic film. i.e.. mirror finished. has been determined by a Scanning Tunneling Microscope (STM). The mean value o the roughness is measured based on STM images of a three dimensional line plot of the surface profile. The technique is found capable of determining the roughness in a nanoscopic scale, lO m. Such technique is used in the present work to measure the roughness of various thin films ( 1 5 tm) in amorphous and crystalline structures.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Khaled J. Habib, Khaled J. Habib, Virgil B. Eling, Virgil B. Eling, C. Wu, C. Wu, } "Measuring surface roughness of an optical thin film with scanning tunneling microscopes", Proc. SPIE 1270, Optical Thin Films and Applications, (1 August 1990); doi: 10.1117/12.20373; https://doi.org/10.1117/12.20373
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