1 August 1990 Stimulated Brillouin scattering at 248 nm for application to lensless imaging
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Proceedings Volume 1271, Adaptive Optics and Optical Structures; (1990) https://doi.org/10.1117/12.20402
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
This contribution describes the results of an investigative study of the use of a commercial narrow band excimer laser in photolithography. The technique for image projection involves the use of phase conjugate mirrors which we produced by stimulated Brillouin scattering . Feature sizes down to 80 m could be projected. Attempts to transfer smaller structures failed since diffraction effects led to an inflation of the focal volume, which eventually reduced the power density below the threshold for stimulated Brillouin scattering. As will be shown the properties of the commercial light source represent the major obstacle towards a substantial improvement in the imaging performance.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anton K. Pfau, Anton K. Pfau, Detlev Proch, Detlev Proch, Friedrich G. Bachmann, Friedrich G. Bachmann, } "Stimulated Brillouin scattering at 248 nm for application to lensless imaging", Proc. SPIE 1271, Adaptive Optics and Optical Structures, (1 August 1990); doi: 10.1117/12.20402; https://doi.org/10.1117/12.20402

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