A simulation-based methodology to analyze the impact of edge-length on curvilinear mask accuracy

Kushlendra Mishra; Rachit Sharma; Ingo Bork; Mary Zuo; Christof Zillner

doi:10.1117/12.2687760

21 November 2023 A simulation-based methodology to analyze the impact of edge-length on curvilinear mask accuracy

Kushlendra Mishra, Rachit Sharma, Ingo Bork, Mary Zuo, Christof Zillner

Proceedings Volume 12751, Photomask Technology 2023; 127511E (2023) https://doi.org/10.1117/12.2687760
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Conference Poster

Abstract

While the curvilinear mask shapes generated by ILT improve the wafer lithography process window, the efficiency of mask data preparation steps and the MBMW data-path depends on the number of edges used to represent complex curvilinear shapes. Shape simplification methods have been shown to be effective in reducing the number of edges used to represent curvilinear mask data. In this paper, we present the development of an approach to analyze the impact of edge-length variation on curvilinear mask accuracy, which can be used as a practical guidance for edge-based representation of curvilinear shapes for a given mask process.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Kushlendra Mishra, Rachit Sharma, Ingo Bork, Mary Zuo, and Christof Zillner "A simulation-based methodology to analyze the impact of edge-length on curvilinear mask accuracy", Proc. SPIE 12751, Photomask Technology 2023, 127511E (21 November 2023); https://doi.org/10.1117/12.2687760

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