Plasma jet polishing of optical surfaces

Heike Müller; Thomas Arnold

doi:10.1117/12.2675793

5 September 2023 Plasma jet polishing of optical surfaces

Heike Müller, Thomas Arnold

Proceedings Volume 12755, Tenth European Seminar on Precision Optics Manufacturing; 1275504 (2023) https://doi.org/10.1117/12.2675793
Event: Tenth European Seminar on Precision Optics Manufacturing (POM23), 2023, Teisnach, Germany

Abstract

Plasma jet polishing of ground freeform optics is presented. Accurate measurement of local maximum surface temperature and a closed-loop for temperature-based power control is necessary to achieve form-preserving uniform surface polishing. Microroughness can be significantly reduced in one step. The roughness after plasma jet polishing in higher spatial frequencies strongly depends on the extend of sub-surface damage and grinding marks.

Citation Download Citation

Heike Müller and Thomas Arnold "Plasma jet polishing of optical surfaces", Proc. SPIE 12755, Tenth European Seminar on Precision Optics Manufacturing, 1275504 (5 September 2023); https://doi.org/10.1117/12.2675793

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