Paper
17 August 2023 Fabrication of a Fabry-Pérot dielectric filter with sub-nanometer narrow bandwidth
Peng Xu, Pengfei Fan, Xiaoyi Liu, Huaying Liu, ZhenDa Xie
Author Affiliations +
Proceedings Volume 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023); 1275735 (2023) https://doi.org/10.1117/12.2690167
Event: 3rd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2023), 2023, Kunming, China
Abstract
The dielectric filter is a commonly used optical filter, benefiting from its low production cost and compact size. While the bandwidth of the dielectric filters made by traditional fabrication technique can hardly reach sub-nanometer. Here, we present a method for fabricating a sub-nanometer dielectric filter using the Fabry-Pérot (FP) cavity. This FP dielectric filter features a full width at half maximum (FWHM) bandwidth of ~0.18 nm, a free spectral range (FSR) of 11.23 nm and a peak transmittance of over 80%.
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peng Xu, Pengfei Fan, Xiaoyi Liu, Huaying Liu, and ZhenDa Xie "Fabrication of a Fabry-Pérot dielectric filter with sub-nanometer narrow bandwidth", Proc. SPIE 12757, 3rd International Conference on Laser, Optics, and Optoelectronic Technology (LOPET 2023), 1275735 (17 August 2023); https://doi.org/10.1117/12.2690167
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KEYWORDS
Dielectric filters

Transmittance

Fabrication

Optical filters

Film thickness

Thin films

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