Bat-wing elimination algorithm based on the CNN in white-light interferometry

Yinrui Li; Yingzhe Yang; Yiyong Liang

doi:10.1117/12.2686830

27 November 2023 Bat-wing elimination algorithm based on the CNN in white-light interferometry

Yinrui Li, Yingzhe Yang, Yiyong Liang

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 1276918 (2023) https://doi.org/10.1117/12.2686830
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Conference Poster

Abstract

White Light Scanning Interferometry (WLSI) is a mature and key method of non-contact three-dimensional (3D) morphometry. However, bat-wing is an inherent problem with WLSI, introducing systematic errors to the measurement results. In this paper, we proposed a filtering algorithm based on the convolutional neural networks (CNN) to solve the problem. A 450 nm standard step is tested to verify the effectiveness of the algorithm. The results show that the method can effectively suppress the batwing effect.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yinrui Li, Yingzhe Yang, and Yiyong Liang "Bat-wing elimination algorithm based on the CNN in white-light interferometry", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 1276918 (27 November 2023); https://doi.org/10.1117/12.2686830

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