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1 August 1990 10 x 10 cm2 aperture x-ray preionized discharge-pumped KrF excimer laser
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Proceedings Volume 1278, Excimer Lasers and Applications II; (1990) https://doi.org/10.1117/12.20605
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
Abstract
A 10 x 10 cm2 aperture X-ray preionized discharge-pumped KrF excimer laser has been constructed. A fast water pulse forming line is discharged via a rail-gap switch into the laser chamber. Collimated X-ray preionization ensures a wide and uniform discharge. The laser pulse energy exceeds 4.7 J in a pulse of 28 ns (FWHM). The active beam cross-section obtained to date is approx. 10 x 8 cm2.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hakaru Mizoguchi, Akira Endo, Jayden N. Jethwa, and Fritz P. Schaefer "10 x 10 cm2 aperture x-ray preionized discharge-pumped KrF excimer laser", Proc. SPIE 1278, Excimer Lasers and Applications II, (1 August 1990); https://doi.org/10.1117/12.20605
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