Excimer laser of extremely homogeneous UV spark preionization

Arnold A. Vill; Ants A. Salk

doi:10.1117/12.20602

1 August 1990 Excimer laser of extremely homogeneous UV spark preionization

Arnold A. Vill, Ants A. Salk

Proceedings Volume 1278, Excimer Lasers and Applications II; (1990) https://doi.org/10.1117/12.20602
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

The positive role of preionization in performance and characteristics of excimer lasers is unquestionable. A brilliant confirmance of it is the work of Taylor1 , in which phenomena, which havn't yet found their' theorist, are described. A designer of concrete instruments must follow one empiric rule: preionization must be as powerful as possible and maximally homogeneous. The discharge being most crucial of to gradients of density of electrons of preionization across the field. It's no wonder, that the best results were obtained when using exloying X-rays for exposition of discharge gap. But X-ray sources are complicated and require good tech- nology of performance, that's why most designers are have recourse to UV preionization either from spark sources, or from surface dis- charge.

Citation Download Citation

Arnold A. Vill and Ants A. Salk "Excimer laser of extremely homogeneous UV spark preionization", Proc. SPIE 1278, Excimer Lasers and Applications II, (1 August 1990); https://doi.org/10.1117/12.20602

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