Translator Disclaimer
1 August 1990 Simple analytic model including shielding by the plume during excimer laser ablation of polyimide
Author Affiliations +
Proceedings Volume 1279, Laser-Assisted Processing II; (1990) https://doi.org/10.1117/12.20621
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
Abstract
For a quantitative description of the ablation of polyimide by excimer laser pulses in the nanosecond range, the concept of a moving surface during the pulse and of the shielding of its trailing edge by the plume is very essential. In a recent publication by Mahan et al.(1989) the concept of a moving interface was solved analytically. The main purpose of this paper is to include here the shielding effect. It will be shown that the resulting analytical formula describes most experimental data with surprising accuracy.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Klaus Schildbach "Simple analytic model including shielding by the plume during excimer laser ablation of polyimide", Proc. SPIE 1279, Laser-Assisted Processing II, (1 August 1990); https://doi.org/10.1117/12.20621
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
Back to Top