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1 August 1990 Synthesis of ultrafine ceramic powders by means of CO2 laser in a flow reactor
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Proceedings Volume 1279, Laser-Assisted Processing II; (1990)
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
High purity, ultrafine Si, SiC and Si N4 powders have been produced from gas phase reactants (SiH, hydrocarbons, NH3) in a C2 laser induced process. Optical on-line diagnostics have been performed to investigate the reaction mechanism in the gas phase. Final product chemical analysis has been employed to check the formation of stoichiometric compounds. Morphologic and crystallographic characterizations of the powders have been performed in order to establish their phase composition, their micro-structure and to understand the growth mechanism which is mostly affected by laser power and residence time.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roberta Fantoni, E. Borsella, S. Piccirillo, and S. Enzo "Synthesis of ultrafine ceramic powders by means of CO2 laser in a flow reactor", Proc. SPIE 1279, Laser-Assisted Processing II, (1 August 1990);


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