Synthesis of ultrafine ceramic powders by means of CO2 laser in a flow reactor

Roberta Fantoni; E. Borsella; S. Piccirillo; S. Enzo

doi:10.1117/12.20623

1 August 1990 Synthesis of ultrafine ceramic powders by means of CO2 laser in a flow reactor

Roberta Fantoni, E. Borsella, S. Piccirillo, S. Enzo

Author Affiliations +

Proceedings Volume 1279, Laser-Assisted Processing II; (1990) https://doi.org/10.1117/12.20623
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

High purity, ultrafine Si, SiC and Si N4 powders have been produced from gas phase reactants (SiH, hydrocarbons, NH3) in a C2 laser induced process. Optical on-line diagnostics have been performed to investigate the reaction mechanism in the gas phase. Final product chemical analysis has been employed to check the formation of stoichiometric compounds. Morphologic and crystallographic characterizations of the powders have been performed in order to establish their phase composition, their micro-structure and to understand the growth mechanism which is mostly affected by laser power and residence time.

Citation Download Citation

Roberta Fantoni, E. Borsella, S. Piccirillo, and S. Enzo "Synthesis of ultrafine ceramic powders by means of CO2 laser in a flow reactor", Proc. SPIE 1279, Laser-Assisted Processing II, (1 August 1990); doi: 10.1117/12.20623; https://doi.org/10.1117/12.20623

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