HOE for clock distribution in integrated circuits: experimental results

D. Prongue; Hans Peter Herzig

doi:10.1117/12.20685

1 August 1990 HOE for clock distribution in integrated circuits: experimental results

D. Prongue, Hans Peter Herzig

Proceedings Volume 1281, Optical Interconnections and Networks; (1990) https://doi.org/10.1117/12.20685
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands

Abstract

This paper reports the design and fabrication of transmission holographic optical elements (HOEs) for clock distribution. First, we have studied and fabricated a multi-focus doublet HOE. The aberrations due to the wavelength shift between recording ( = 488 nm) and reconstruction ( = 780 nm) have been minimized by an appropriate recording and readout geometry. The diffraction efficiency has been optimized by a copying technique. Second, we have investigated the near-field internal reflection (TIR) holographic recording technique to solve the problems of miniaturization. With this method, we have recorded a lOOxlOO lenlet array with focal lengths of f =400 μm.

Citation Download Citation

D. Prongue and Hans Peter Herzig "HOE for clock distribution in integrated circuits: experimental results", Proc. SPIE 1281, Optical Interconnections and Networks, (1 August 1990); https://doi.org/10.1117/12.20685

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