1 August 1990 Silicon micromachined (2x2) opto coupler
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Proceedings Volume 1281, Optical Interconnections and Networks; (1990); doi: 10.1117/12.20682
Event: The International Congress on Optical Science and Engineering, 1990, The Hague, Netherlands
Abstract
Micromachining in silicon is a well established technique for manufacturing sensors and actuators. Another field is fiber alignment components such as V-grooves and reflecting mirrors. This work is aimed towards a batch fabricated opto coupler with the use of both V-grooves and perpendicular inflecting mirrors on the same silicon wafer, with a maximum utilization of the single crystalline lattice structure. Since both the (1 1 1) and (100)-etchstop planes are given by the crystal lattice structure, it is possible to obtain a well defmed 45 degree angle between the [1 10] and [100]-directions. The main function of the (2x2) coupler is that a perpendicular wall has a height that covers half the fiber core. The result is that half of the incoming light beam passes over the wall and the other half is reflected. There will obviously be some geometrical limitations for the distance between the fibers, which introduces optical loss that must be considered. The measured excess loss is 4dB above the theoretical limit.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Leif Smith, Lars Tenerz, Bertil Hok, "Silicon micromachined (2x2) opto coupler", Proc. SPIE 1281, Optical Interconnections and Networks, (1 August 1990); doi: 10.1117/12.20682; https://doi.org/10.1117/12.20682
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KEYWORDS
Mirrors

Silicon

Manufacturing

Crystals

Sensors

Etching

Optical alignment

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