Defect structures in MBE grown GaAs on Si

Sam-Dong Kim; Tony Ma; Zofia U. Rek; James S. Harris Jr.

doi:10.1117/12.20823

1 October 1990 Defect structures in MBE grown GaAs on Si

Sam-Dong Kim, Tony Ma, Zofia U. Rek, James S. Harris Jr.

Proceedings Volume 1285, Growth of Semiconductor Structures and High-Tc Thin Films on Semiconductors; (1990) https://doi.org/10.1117/12.20823
Event: Advances in Semiconductors and Superconductors: Physics Toward Devices Applications, 1990, San Diego, CA, United States

Abstract

The major remaining limitation for the application of GaAs on Si is the reduction of high dislocation density and resulting electronic defects in the GaAs layer. We have investigated defect structures in GaAs layers grown on Si by molecular beam epitaxy(MBE) with different structures in the GaAs/Si interface region. Interface region variables include thickness, designs of InGaiAs/GaAs strained layer superlattices(SLSs) and growth conditions of the GaAs buffer layers(AsJGa ratio and in-situ annealing at 750°C). These layers were examined by transmission electron microscope(TEM) and double crystal Xray diffraction. Defects, such as dislocations and stacking faults, exhibit a much stronger dependence on the growth conditions of the GaAs buffer layers compared to the magnitude of strain energy in the SLSs. Larger misorientation angles(O.35° and 0.26°) between the GaAs epilayers and Si substrates resulted in reduced defect densities compared to more highly dislocated layers with less misorientation(O°,1.O°,1.O° and 0.3°).

Citation Download Citation

Sam-Dong Kim, Tony Ma, Zofia U. Rek, and James S. Harris Jr. "Defect structures in MBE grown GaAs on Si", Proc. SPIE 1285, Growth of Semiconductor Structures and High-Tc Thin Films on Semiconductors, (1 October 1990); https://doi.org/10.1117/12.20823

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available