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1 August 1990Discussion of modulation mechanisms in electron-beam electroreflectance and comparison to alternative modulation techniques
Electron Beam Electroreflectance (EBER), a low power-density form of cathodoreflectance, has been
investigated for use in a wide variety of potential applications. Herein, we describe a phenomenological theory of
EBER and provide experimental support for the inherent electroreflectance and thermoreflectance mechanisms.
In addition to pair generation and heating proposed earlier, a new mechanism, electron charging of the surface, is
identified from the 2f EBER signal of P-type semiconductors. Finally, we compare the potential advantages of
EBER to those of photoreflectance.
Michael H. Herman
"Discussion of modulation mechanisms in electron-beam electroreflectance and comparison to alternative modulation techniques", Proc. SPIE 1286, Modulation Spectroscopy, (1 August 1990); https://doi.org/10.1117/12.20835
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Michael H. Herman, "Discussion of modulation mechanisms in electron-beam electroreflectance and comparison to alternative modulation techniques," Proc. SPIE 1286, Modulation Spectroscopy, (1 August 1990); https://doi.org/10.1117/12.20835