Recent progress in heterogeneous integration on the silicon nitride platform using micro-transfer printing

Maximlien Billet; Tom Vanackere; Tom Vandekerckhove; Margot Niels; Luis Reis; Dennis Maes; Max Kiewiet; Konstantinos Akritidis; Stijn Cuyvers; Stijn Poelman; Tom Reep; Valeria Bonito Oliva; Francois Leo; Gunther Roelkens; Bart Kuyken

doi:10.1117/12.2691017

12 March 2024 Recent progress in heterogeneous integration on the silicon nitride platform using micro-transfer printing

Maximlien Billet, Tom Vanackere, Tom Vandekerckhove, Margot Niels, Luis Reis, Dennis Maes, Max Kiewiet, Konstantinos Akritidis, Stijn Cuyvers, Stijn Poelman, Tom Reep, Valeria Bonito Oliva, Francois Leo, Gunther Roelkens, Bart Kuyken

Author Affiliations +

Proceedings Volume 12891, Silicon Photonics XIX; 128910B (2024) https://doi.org/10.1117/12.2691017
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Photonic integrated circuits enable the miniaturization of photonic systems by integrating key optical functions on a chip. While CMOS compatible silicon and silicon nitride are very efficient platforms for passive circuits, they lack active key functionalities for the realization of a full system on a chip. A versatile solution is to use micro-transfer printing for heterogeneous integration of active devices on such platforms. Here we present the recent advances of micro-transfer printing on silicon nitride and discuss the remaining challenges.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Maximlien Billet, Tom Vanackere, Tom Vandekerckhove, Margot Niels, Luis Reis, Dennis Maes, Max Kiewiet, Konstantinos Akritidis, Stijn Cuyvers, Stijn Poelman, Tom Reep, Valeria Bonito Oliva, Francois Leo, Gunther Roelkens, and Bart Kuyken "Recent progress in heterogeneous integration on the silicon nitride platform using micro-transfer printing", Proc. SPIE 12891, Silicon Photonics XIX, 128910B (12 March 2024); https://doi.org/10.1117/12.2691017

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