3D integrated 2D addressable VCSEL array with highly uniform short pulse characteristics

Gyongsok Song; Yasutaka Higa; Hideki Watanabe; Yoshio Konishi; Hayato Kamizuru; Kiyohisa Sakai; Hirohisa Yasukawa; Shunsuke Sakazume; Hiroshi Yoshida; Daisuke Hirono; Yuta Sano; Kazuki Kitta; Masato Oishi; Takeshi Satou; Yuta Otoguro; Rintaro Koda; Noriyuki Fuutagawa

doi:10.1117/12.3000480

13 March 2024 3D integrated 2D addressable VCSEL array with highly uniform short pulse characteristics

Gyongsok Song, Yasutaka Higa, Hideki Watanabe, Yoshio Konishi, Hayato Kamizuru, Kiyohisa Sakai, Hirohisa Yasukawa, Shunsuke Sakazume, Hiroshi Yoshida, Daisuke Hirono, Yuta Sano, Kazuki Kitta, Masato Oishi, Takeshi Satou, Yuta Otoguro, Rintaro Koda, Noriyuki Fuutagawa

Author Affiliations +

Proceedings Volume 12904, Vertical-Cavity Surface-Emitting Lasers XXVIII; 1290407 (2024) https://doi.org/10.1117/12.3000480
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

We demonstrate a 3D integrated 2D addressable VCSEL array that integrates high power 2D VCSEL array on a circuit board with a built-in laser driver by flip-chip bonding, resulting in high optical power density of 1,500 W/mm2 and short pulse duration of 2 ns. Each VCSEL is designed to oscillate at 940 nm and has seven junctions, large optical aperture and Cu pillar bumps for individual driving. Compared to our previous report5 , the optical output power is improved from 45 to 80 W/channel by increasing filling factor which is the ratio of active area to chip size from 33 % to 59 % and decreasing operating voltage by changing donor in tunnel junction from Si to Te. Additionally, the optical pulse shape has short rise time 1 ns and a narrow pulse width of 2 ns thanks to low inductance in this unique structure, and highly uniform optical pulse shape was observed in the plane due to small deviation of inductance from various positions of VCSEL array. We also confirmed that there was no degradation after 1000 hours of operation at an ambient temperature of 105 °C and 40 V, and after 1000 cycles of temperature cycle test from -40 to 125 °C in the module configuration. We believe that this advanced 3D integrated 2D addressable VCSEL array is the candidate for a light source of advanced LiDAR system with "ROI" (region of interest) focusing and low power consumption due to its zone-emission characteristics.

Conference Presentation

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Gyongsok Song, Yasutaka Higa, Hideki Watanabe, Yoshio Konishi, Hayato Kamizuru, Kiyohisa Sakai, Hirohisa Yasukawa, Shunsuke Sakazume, Hiroshi Yoshida, Daisuke Hirono, Yuta Sano, Kazuki Kitta, Masato Oishi, Takeshi Satou, Yuta Otoguro, Rintaro Koda, and Noriyuki Fuutagawa "3D integrated 2D addressable VCSEL array with highly uniform short pulse characteristics", Proc. SPIE 12904, Vertical-Cavity Surface-Emitting Lasers XXVIII, 1290407 (13 March 2024); https://doi.org/10.1117/12.3000480

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