1 October 1990 Deposition and patterning of Tl-Ca-Ba-Cu-O superconducting thin films
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Abstract
High temperature superconducting Tl-Ca-Ba-Cu-0 thin films were sputter deposited from a single composite powder target on SrTiO3 and LaAlO3 substrates, in an rf magnetron sputtering system. The as-deposited thin films were sintered and annealed in an excess Tl partial pressure to obtain superconductivity. The superconducting films were characterized by scanning electron microscope (SEM), x-ray diffraction (XRD) and resistance vs temperature (R vs T) measurements. Fine line features as small as 25 jim were obtained in as-deposited thin films using standard photolithography and wet chemical etching in a weak acid. From the XRD and SEM results, the annealed thin films were found to be highly c-axis oriented, with smooth platelets of 2-10 pm in size. The R vs T measurements showed zero resistance at temepratures as high as 107 K on SrTiO3 and 103 K on LaA1O3.
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Gurunathan Subramanyam, Gurunathan Subramanyam, Farhad Radpour, Farhad Radpour, Vikram J. Kapoor, Vikram J. Kapoor, George H. Lemon, George H. Lemon, } "Deposition and patterning of Tl-Ca-Ba-Cu-O superconducting thin films", Proc. SPIE 1292, Superconductivity Applications for Infrared and Microwave Devices, (1 October 1990); doi: 10.1117/12.21045; https://doi.org/10.1117/12.21045
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