Paper
1 October 1990 High Tc film development for electronic applications
John Talvacchio, George R. Wagner
Author Affiliations +
Abstract
We describe the requirements and status of high-T superconductor (HTS) films for the development of electronic applications with an emphasis on passive microwave devices. One of the most general requirements, a low rf surface resistance relative to Cu, has been achieved in films of several different HTS compounds. However the best films, made of YBa2Cu3O7 (YBCO) by any one of several techniques, have in common a residual surface resistance that is much greater than predicted by conventional superconductivity theory. Improvement in films is also limited by the current size and selection of single-crystal substrate materials. Other issues that must be resolved to develop a full integrated circuit technology for HTS are substrate heating during film deposition, deposited epitaxial insulators, and determination of which interfaces in a multilevel circuit must be formed in 8ztu.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John Talvacchio and George R. Wagner "High Tc film development for electronic applications", Proc. SPIE 1292, Superconductivity Applications for Infrared and Microwave Devices, (1 October 1990); https://doi.org/10.1117/12.21023
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Cited by 26 scholarly publications.
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KEYWORDS
Dielectrics

Niobium

Resistance

Microwave radiation

Sapphire

Resonators

Copper

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