Paper
1 October 1990 In-situ integrated processing of high Tc superconductors and related materials by MOCVD for the fabrication of hybrid superconductor/semiconductor devices
Rajendra Singh, Sanjai Sinha, J. T. C. Ng, N. J. Hsu
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Abstract
Rapid isothermal processing and microwave-excited gases (N2O + O2 + He) have been used to deposit YBCO films on YSZ substrates. The thermal cycle represents the lowest thermal budget used by any other researcher. A Tc of 75 K was observed. These results coupled with the capability of depositing YBCO on BaF2/Si substrate indicate the usefulness of MOCVD for the practical realization of superconductor/semiconductor hybrid devices.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rajendra Singh, Sanjai Sinha, J. T. C. Ng, and N. J. Hsu "In-situ integrated processing of high Tc superconductors and related materials by MOCVD for the fabrication of hybrid superconductor/semiconductor devices", Proc. SPIE 1292, Superconductivity Applications for Infrared and Microwave Devices, (1 October 1990); https://doi.org/10.1117/12.21024
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KEYWORDS
Metalorganic chemical vapor deposition

Superconductors

Microwave radiation

Barium

Semiconductors

Infrared radiation

Plasma

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