1 January 1990 Group technology in multichamber and in-situ processing
Author Affiliations +
Abstract
Group technology is a useful technique of general manufacturing systems that provides production efficiency in fabrication of similar but not identical devices on the same machines. In this paper, we extend this concept to computer-integrated- manufacturing of custom VLSI semiconductor devices, particularly in the area of multichamber and in-situ processing.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Su-Shing Chen, "Group technology in multichamber and in-situ processing", Proc. SPIE 1293, Applications of Artificial Intelligence VIII, (1 January 1990); doi: 10.1117/12.21109; https://doi.org/10.1117/12.21109
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT

Mask automation need a revolution in mask makers and...
Proceedings of SPIE (September 09 2013)
Matching analysis on seven manufacturing CD SEMs
Proceedings of SPIE (June 08 1998)
Haze defect control and containment in a high volume DRAM...
Proceedings of SPIE (November 08 2005)
Mask-/reticle-making control system
Proceedings of SPIE (July 03 1995)

Back to Top