1 January 1990 Group technology in multichamber and in-situ processing
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Group technology is a useful technique of general manufacturing systems that provides production efficiency in fabrication of similar but not identical devices on the same machines. In this paper, we extend this concept to computer-integrated- manufacturing of custom VLSI semiconductor devices, particularly in the area of multichamber and in-situ processing.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Su-Shing Chen, Su-Shing Chen, } "Group technology in multichamber and in-situ processing", Proc. SPIE 1293, Applications of Artificial Intelligence VIII, (1 January 1990); doi: 10.1117/12.21109; https://doi.org/10.1117/12.21109


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