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22 December 2023 Investigation on the dynamic damage process of HfO2/SiO2 anti-reflection coatings under 1064nm nanosecond laser irradiation
Chengjiang Xiang, Xiaofeng Liu, Chunxian Tao, Dawei Li, Yuan’an Zhao, Jian Sun, Weili Zhang, Yuchuan Shao, Jianda Shao
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Proceedings Volume 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers; 129820A (2023) https://doi.org/10.1117/12.3016610
Event: SPIE/SIOM Pacific Rim Laser Damage, 2023, Shanghai, China
Abstract
Time-resolved pump-probe technology is an effective method to study the dynamic damage process of optics. In this paper, the dynamic damage process of HfO2/SiO2 anti-reflection coating, for the cases that the coating located on the laser incidence (forward process) and exit (reverse process) surface, irradiated by a 1064nm nanosecond laser was studied based on the time-resolved pump-probe technology of intensified charge-coupled device (ICCD). Under the irradiation of the same fluence (52J/cm2), pits without and with the layer peeling existed in both forward and reverse processes. However, the lateral size and depth of the small pits generated by the reverse process are larger than those of the forward process. The finite element analysis shows that the electric field intensity (EFI) on the substrate-coating interface for the forward and reverse processes is similar, which is not enough to form the difference in damage morphology. These results indicate the develop process of the plasma after its formation under the subsequent laser pulse irradiation determines the damage difference in the above two cases. The time-resolved study of anti-reflective coating damage is of great significance for its damage mechanism analysis and practical application.
(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Chengjiang Xiang, Xiaofeng Liu, Chunxian Tao, Dawei Li, Yuan’an Zhao, Jian Sun, Weili Zhang, Yuchuan Shao, and Jianda Shao "Investigation on the dynamic damage process of HfO2/SiO2 anti-reflection coatings under 1064nm nanosecond laser irradiation", Proc. SPIE 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers, 129820A (22 December 2023); https://doi.org/10.1117/12.3016610
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KEYWORDS
Plasma
Antireflective coatings
Laser irradiation
Coating
Nanosecond lasers
Electric fields
Laser induced damage
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