Resistance comparison of 45° incident angle NIR laser anti-reflection film coating with different materials

Yuanyuan Liu; Jianhua Chen; Jianqi Yuan; Jianing Dong; Baoyu Zhang

doi:10.1117/12.3018605

22 December 2023 Resistance comparison of 45° incident angle NIR laser anti-reflection film coating with different materials

Yuanyuan Liu, Jianhua Chen, Jianqi Yuan, Jianing Dong, Baoyu Zhang

Author Affiliations +

Proceedings Volume 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers; 129820J (2023) https://doi.org/10.1117/12.3018605
Event: SPIE/SIOM Pacific Rim Laser Damage, 2023, Shanghai, China

Abstract

In view of the application requirements of optical elements with some incident angle in laser-related products, laser damage measurement were carried out on 1064nm anti-reflection films with an incident angle of 45° deposited with the commonly used film materials combination HfO₂-SiO₂ and film materials combination ZrO₂-MgF₂, and the resistance of laser induced damage of the two samples was compared. Two groups of experiments prepared with different film materials were carried out in evaporation coating equipment equipped vacuum pump without oil. Then we designed the film structure, formulated the process plan and got the sample respectively. LIDT of two samples were measured, and the results were analyzed and compared. The results show that the film deposited by the film materials combination ZrO₂-MgF₂ performed well when the process conditions were suitable for the materials. And the resistance of laser induced damage performed similar to the film materials combination HfO₂-SiO₂ under similar process conditions. The research about material ZrO₂-MgF₂ may be strengthened in the future.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yuanyuan Liu, Jianhua Chen, Jianqi Yuan, Jianing Dong, and Baoyu Zhang "Resistance comparison of 45° incident angle NIR laser anti-reflection film coating with different materials", Proc. SPIE 12982, Pacific-Rim Laser Damage 2023: Optical Materials for High-Power Lasers, 129820J (22 December 2023); https://doi.org/10.1117/12.3018605

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KEYWORDS

Laser induced damage

Antireflective coatings

Vacuum

Resistance

Coating

Laser damage threshold

Electric fields

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