1 October 1990 Pressure distribution under flexible polishing tools: I. Conventional aspheric optics
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Abstract
The paper presents a mathematical model, based on Kirchoff's thin flat plate theory, developed to determine polishing pressure distribution for a flexible polishing tool. A two-layered tool in which bending and compressive stiffnesses are equal is developed, which is formulated as a plate on a linearly elastic foundation. An equivalent eigenvalue problem and solution for a free-free plate are created from the plate formulation. For aspheric, anamorphic optical surfaces, the tool misfit is derived; it is defined as the result of movement from the initial perfect fit on the optic to any other position. The Polisher Design (POD) software for circular tools on aspheric optics is introduced. NASTRAN-based finite element analysis results are compared with the POD software, showing high correlation. By employing existing free-free eigenvalues and eigenfunctions, the work may be extended to rectangular polishing tools as well.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pravin K. Mehta, Robert E. Hufnagel, "Pressure distribution under flexible polishing tools: I. Conventional aspheric optics", Proc. SPIE 1303, Advances in Optical Structure Systems, (1 October 1990); doi: 10.1117/12.21503; https://doi.org/10.1117/12.21503
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