1 October 1990 Pressure distribution under flexible polishing tools: II. Cylindrical (conical) optics
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Abstract
A previously developed eigenvalue model is extended to determine polishing pressure distribution by rectangular tools with unequal stiffness in two directions on cylindrical optics. Tool misfit is divided into two simplified one-dimensional problems and one simplified two-dimensional problem. Tools with nonuniform cross-sections are treated with a new one-dimensional eigenvalue algorithm, permitting evaluation of tool designs where the edge is more flexible than the interior. This maintains edge pressure variations within acceptable parameters. Finite element modeling is employed to resolve upper bounds, which handle pressure changes in the two-dimensional misfit element. Paraboloids and hyperboloids from the NASA AXAF system are treated with the AXAFPOD software for this method, and are verified with NASTRAN finite element analyses. The maximum deviation from the one-dimensional azimuthal pressure variation is predicted to be 10 percent and 20 percent for paraboloids and hyperboloids, respectively.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pravin K. Mehta, Pravin K. Mehta, } "Pressure distribution under flexible polishing tools: II. Cylindrical (conical) optics", Proc. SPIE 1303, Advances in Optical Structure Systems, (1 October 1990); doi: 10.1117/12.21504; https://doi.org/10.1117/12.21504
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